ESC(Electro-Static Chuck) Repair
DT ENG INC. performs a systematic operational process based on a total of 20 detailed steps outlined in the standard operating procedure. This is the schematized repair standard process derived from the operational manual.
| Process No. | Plate Type | Coating Type |
|---|---|---|
| Step 0 | Product Reception : Confirmation of incoming products | |
| Step 1 | Analysis and Evaluation of Damage / Plate Type Determination : Analysis and evaluation of product damage, planning process based on Plate Type | |
| Step 2 | Plate De-bonding : Release of bonding joints | Coating Stripping : Progression of existing coating stripping |
| Step 3 | Plate Bonding : Bonding of plate joints | ESC (Emergency Stop Circuit) Coating : Application of new ESC coating |
| Step 4 | Processing : Establishing optimal process conditions through processing | |
| Step 5 | Pattern Formation : Formation of functional patterns of the electrostatic chuck | |
| Step 6 | Product Cleaning : Removal of impurities or foreign substances | |
| Step 7 | Verification and Evaluation of Product : Verification of quality and checking compliance with standards | |
| Step 8 | Product Packaging : Packaging of finished products | |
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